Amsterdam Science Park (ASP) is a pearl in the crown of the Amsterdam knowledge economy, with its high-level research institutes (the Faculty of Science of the University of Amsterdam, several institutes of the NWO, the Dutch national science organisation) and a growing number of knowledge-based companies …

The characteristics of a hydrogen plasma in an inductively coupled RF plasma setup were studied using a double Langmuir probe and an optical emission spectrometer. At various settings for the gas pressure, gas ow, RF power and probe position, values were obtained for the electron temperature and plasma …